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List all 12 ETCH 16 CVD PVD RTP 1 FURNACE STEPPER TRACK 7 METROLOGY WET IMP 1 ETC

7101002. Lam 2300, Exelan

  • No:
    7101002
  • Category:
    Etch
  • Maker:
    Lam
  • Model:
    2300, Exelan
  • Wafer Size:
    300
  • SN:
  • Process:
    Oxide
  • Config
    2x Exelan chamber,
    TM
    AC Rack
    Controller
    GAS Box
    Missing:
    (EFEM , Mag7 robot, RF cart , Turbo pump, )