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List all 12 ETCH 16 CVD PVD RTP 1 FURNACE STEPPER TRACK 8 METROLOGY WET IMP 1 ETC

9091002. MATTSON Paradigme

  • No:
    9091002
  • Category:
    Etch
  • Maker:
    MATTSON
  • Model:
    Paradigme
  • Wafer Size:
    300
  • SN:
    ME0121
  • Process:
    Etch
  • Config
    SFEM only.
    Yaskawa robot : XU-RC820M-F01
    Rorze 2x Load Port: RV201-F06-A02-1