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12
ETCH
16
CVD
PVD
RTP
1
FURNACE
STEPPER
TRACK
7
METROLOGY
WET
IMP
1
ETC
'0031012. AMAT P5000
List
No:
'0031012
Category:
CVD
Maker:
AMAT
Model:
P5000
Wafer Size:
200
SN:
4531
Process:
CVD
Config
3x DLH chamber, 8 Slot storage,
3x OEM12B RF Generator,
No:
'0031012
Category:
CVD
Maker:
AMAT
Model:
P5000
Wafer Size:
200
SN:
4531
Process:
CVD
Config
3x DLH chamber, 8 Slot storage,
3x OEM12B RF Generator,
Releted Works
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