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'0031012. AMAT P5000

  • No:
    '0031012
  • Category:
    CVD
  • Maker:
    AMAT
  • Model:
    P5000
  • Wafer Size:
    200
  • SN:
    4531
  • Process:
    CVD
  • Config
    3x DLH chamber, 8 Slot storage,
    3x OEM12B RF Generator,