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List all 12 ETCH 16 CVD PVD RTP 1 FURNACE STEPPER TRACK 7 METROLOGY WET IMP 1 ETC

'0101001. AMAT DPS II MESA

  • No:
    '0101001
  • Category:
    Etch
  • Maker:
    AMAT
  • Model:
    DPS II MESA
  • Wafer Size:
    300
  • SN:
    430282
  • Process:
    Poly
  • Config
    No EFEM:
    Buffer chamber : NO VHP robot
    4 Process chamber (3x DPS II, 1x Axiom) ( No Turbo pump)
    AC rack