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List all 12 ETCH 16 CVD PVD RTP 1 FURNACE STEPPER TRACK 7 METROLOGY WET IMP 1 ETC

2011004. LAM Torus300B

  • No:
    2011004
  • Category:
    Etch
  • Maker:
    LAM
  • Model:
    Torus300B
  • Wafer Size:
    300
  • SN:
  • Process:
    Bevel etch
  • Config
    EFEM, ATM Robot and 3 Brooks Loader