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2061001. AMAT P5000
No:
2061001Category:
CVDMaker:
AMATModel:
P5000Wafer Size:
150SN:
4027Process:
PECVDConfig
P5000 Main Body ( 3x DLH PECVD Chamber.)
1x AMAT0
AC Remote Rack.
Monitor rack
No:
2061001Category:
CVDMaker:
AMATModel:
P5000Wafer Size:
150SN:
4027Process:
PECVD
Config
P5000 Main Body ( 3x DLH PECVD Chamber.)
1x AMAT0
AC Remote Rack.
Monitor rack
1x AMAT0
AC Remote Rack.
Monitor rack