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List all 12 ETCH 16 CVD PVD RTP 1 FURNACE STEPPER TRACK 7 METROLOGY WET IMP 1 ETC

2101003. AMAT P5000

  • No:
    2101003
  • Category:
    CVD
  • Maker:
    AMAT
  • Model:
    P5000
  • Wafer Size:
    150
  • SN:
    CA5905
  • Process:
    PECVD
  • Config
    2x DLH chamber