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2101002. AMAT DPS II MESA
No:
2101002Category:
EtchMaker:
AMATModel:
DPS II MESAWafer Size:
300SN:
407529Process:
PolyConfig
Buffer chamber
1x Axiom chamber
AC rack
No EFEM, No DPS Chamber
No:
2101002Category:
EtchMaker:
AMATModel:
DPS II MESAWafer Size:
300SN:
407529Process:
Poly
Config
Buffer chamber
1x Axiom chamber
AC rack
No EFEM, No DPS Chamber
1x Axiom chamber
AC rack
No EFEM, No DPS Chamber