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List all 12 ETCH 16 CVD PVD RTP 1 FURNACE STEPPER TRACK 7 METROLOGY WET IMP 1 ETC

2101002. AMAT DPS II MESA

  • No:
    2101002
  • Category:
    Etch
  • Maker:
    AMAT
  • Model:
    DPS II MESA
  • Wafer Size:
    300
  • SN:
    407529
  • Process:
    Poly
  • Config
    Buffer chamber
    1x Axiom chamber
    AC rack

    No EFEM, No DPS Chamber