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12
ETCH
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CVD
PVD
RTP
1
FURNACE
STEPPER
TRACK
7
METROLOGY
WET
IMP
1
ETC
3041001. AMAT P5000
List
No:
3041001
Category:
CVD
Maker:
AMAT
Model:
P5000
Wafer Size:
150
SN:
4172
Process:
W CVD
Config
3x W CVD, Lamp Type
8 Slot storage
No:
3041001
Category:
CVD
Maker:
AMAT
Model:
P5000
Wafer Size:
150
SN:
4172
Process:
W CVD
Config
3x W CVD, Lamp Type
8 Slot storage
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