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3041001. AMAT P5000

  • No:
    3041001
  • Category:
    CVD
  • Maker:
    AMAT
  • Model:
    P5000
  • Wafer Size:
    150
  • SN:
    4172
  • Process:
    W CVD
  • Config
    3x W CVD, Lamp Type
    8 Slot storage