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List all 12 ETCH 16 CVD PVD RTP 1 FURNACE STEPPER TRACK 7 METROLOGY WET IMP 1 ETC

3051001. TEL Unity 2 855DD

  • No:
    3051001
  • Category:
    Etch
  • Maker:
    TEL
  • Model:
    Unity 2 855DD
  • Wafer Size:
    200
  • SN:
    U01651
  • Process:
    Oxide
  • Config
    2x DRM System
    V2 Controller Rack
    AC Rack
    1x SMC Chiller