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List all 12 ETCH 16 CVD PVD RTP 1 FURNACE STEPPER TRACK 7 METROLOGY WET IMP 1 ETC

7091004. AMAT P5000

  • No:
    7091004
  • Category:
    Etch
  • Maker:
    AMAT
  • Model:
    P5000
  • Wafer Size:
    150
  • SN:
    7284
  • Process:
    Metal
  • Config
    2x MXP R2Chamber, Mech Clamp,
    29 slot Sto Elevator
    2x OEM 12B RF Generator
    2x AMAT 1 H/E