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List all 30 ETCH 24 CVD PVD RTP 1 FURNACE STEPPER TRACK 9 METROLOGY WET IMP 1 ETC

25101013. PSK TERA21

  • No:
    25101013
  • Category:
    ETCH
  • Maker:
    PSK
  • Model:
    TERA21
  • Wafer Size:
    300
  • SN:
    PTK04007
  • Process:
  • Config
    4x u-wave type Chambers