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List all 30 ETCH 24 CVD PVD RTP 1 FURNACE STEPPER TRACK 9 METROLOGY WET IMP 1 ETC

25101027. LAM 2300KIYO_FX

  • No:
    25101027
  • Category:
    ETCH
  • Maker:
    LAM
  • Model:
    2300KIYO_FX
  • Wafer Size:
    300
  • SN:
    23ST45661
  • Process:
  • Config
    Strip45 chamber w/AX7690